VLSI fabrication principles: silicon and gallium arsenide
Fully updated with the latest technologies, this edition covers the fundamental principles underlying fabrication processes for semiconductor devices along with integrated circuits made from silicon and gallium arsenide. Stresses fabrication criteria for such circuits as CMOS, bipolar, MOS, FET, etc. These diverse technologies are introduced separately and then consolidated into complete circuits.
2-Phase Diagrams and Solid Solubility.
3-Crystal Growth and Doping.
9-Etching and Cleaning.
11-Device and Circuit Fabrication.
You can download this book from any of the following links. If any link is dead please feel free to leave a comment.
This site does not store any files on its server. We only index and link to content provided by other sites. Please contact the content providers to delete copyright contents if any and email us, we'll remove relevant links or contents immediately.