Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Part I: Lithography
Introduction to Part I
Next-Generation Lithographies and Lithography Research
Part II: Pattern Transfer with Subtractive Techniques
Introduction to Part II
Wet Chemical Etching and Wet Bulk MicromachiningPools as Tools
Thermal Energy-Based Removing
Part III: Pattern Transfer with Additive Techniques
Introduction to Part III
Physical and Chemical Vapor DepositionThin Film Properties and Surface Micromachining
Chemical, Photochemical, and Electrochemical Forming Techniques
Thermal Energy-Based Forming TechniquesThermoforming
10 Micromolding Techniques LIGA
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